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  Title Author Year
  An Introduction to Microelectromechanical Systems Engineering (IPF®) Nadim Maluf 2000
  An Introduction to Microelectromechanical Systems Engineering, Second Edition Nadim Maluf and Kirt Williams 2004
An Introduction to Microelectromechanical Systems Engineering, Second Edition eBook Nadim Maluf and Kirt Williams 2004
  Fundamentals and Applications of Microfluidics, Second Edition Nam-Trung Nguyen and Steven T. Wereley 2006
  Hybrid CMOS Single-Electron-Transistor Device and Circuit Design Santanu Mahapatra and Adrian Mihai Ionescu Available October 2006
  Introduction to Microelectromechanical (MEM) Microwave Systems (IPF®) Hector J. De Los Santos 1999
  Introduction to Microelectromechanical Microwave Systems, Second Edition Hector J. De Los Santos 2004
Introduction to Microelectromechanical Microwave Systems, Second Edition eBook Hector J. De Los Santos 2004
  MEMS Mechanical Sensors Stephen Beeby, Graham Ensell, Michael Kraft, Neil White 2004
MEMS Mechanical Sensors eBook Stephen Beeby, Graham Ensell, Michael Kraft, Neil White 2004
  Microfluidics for Biotechnology Jean Berthier and Pascal Silberzan 2006
  Post-Processing Techniques for Integrated MEMS Sherif Sedky 2006
  RF MEMS Circuit Design for Wireless Applications Hector J. De Los Santos 2002

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